{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11293888","patent":{"patent_number":"US-11293888","title":"Sensor","assignee":null,"inventors":[],"filing_date":"2019-11-12T00:00:00.000Z","publication_date":"2022-04-05T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","H01L","H01L","H01L","H01L","H01L"],"num_claims":16,"abstract":"A sensor includes a substrate, a reference electrode provided above the substrate, a lower electrode provided above the reference electrode via an insulating film, and an upper electrode provided above the lower electrode via a physical quantity detecting film. The upper electrode and the lower electrode form a parallel-plate-type detection capacitor, and the lower electrode and the reference electrode form a parallel-plate-type reference capacitor."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sensor","description":"A sensor includes a substrate, a reference electrode provided above the substrate, a lower electrode provided above the reference electrode via an insulating film, and an upper electrode provided abov","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11293888","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11293888","citation_suggestion":"Patentable. \"Sensor\" (US-11293888). https://patentable.app/patents/US-11293888","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11293888","json":"https://patentable.app/api/llm-context/US-11293888","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:35:09.967Z"}