{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11294168","patent":{"patent_number":"US-11294168","title":"Process for manufacturing a MEMS micromirror device, and associated device","assignee":null,"inventors":[],"filing_date":"2020-08-05T00:00:00.000Z","publication_date":"2022-04-05T00:00:00.000Z","cpc_codes":["H04N"],"num_claims":24,"abstract":"A MEMS micromirror device includes a monolithic body of semiconductor material having a first main surface and a second main surface, with the monolithic body having an opening extending from the second main surface and including a suspended membrane of monocrystalline semiconductor material extending between the opening and the first main surface of the monolithic body. The suspended membrane includes a supporting frame and a mobile mass carried by the supporting frame and rotatable about an axis parallel to the first main surface, with the mobile mass having a width less than a width of the opening. A reflecting region extends over the mobile mass."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Process for manufacturing a MEMS micromirror device, and associated device","description":"A MEMS micromirror device includes a monolithic body of semiconductor material having a first main surface and a second main surface, with the monolithic body having an opening extending from the seco","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11294168","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11294168","citation_suggestion":"Patentable. \"Process for manufacturing a MEMS micromirror device, and associated device\" (US-11294168). https://patentable.app/patents/US-11294168","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11294168","json":"https://patentable.app/api/llm-context/US-11294168","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T01:31:33.353Z"}