{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11294537","patent":{"patent_number":"US-11294537","title":"Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program","assignee":null,"inventors":[],"filing_date":"2019-01-30T00:00:00.000Z","publication_date":"2022-04-05T00:00:00.000Z","cpc_codes":["G06F","G09G","G06F","G06F","G06T","G09G","G09G","G09G"],"num_claims":14,"abstract":"In order to process time series data obtained in a substrate processing apparatus having a plurality of processing units, a data processing method includes an evaluation value calculation step of obtaining a score of the time series data by comparing the time series data with reference data, and a result display step of displaying an evaluation result screen including, for each processing unit, a number of score errors being a number of substrates of which score is abnormal, and a pie chart showing a ratio of the number of score errors to a number of processed substrates. A display size of the number of score errors and that of the pie chart change depending on the number of score errors."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program","description":"In order to process time series data obtained in a substrate processing apparatus having a plurality of processing units, a data processing method includes an evaluation value calculation step of obta","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11294537","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11294537","citation_suggestion":"Patentable. \"Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program\" (US-11294537). https://patentable.app/patents/US-11294537","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11294537","json":"https://patentable.app/api/llm-context/US-11294537","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T15:47:52.625Z"}