{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11295985","patent":{"patent_number":"US-11295985","title":"Forming a backside ground or power plane in a stacked vertical transport field effect transistor","assignee":null,"inventors":[],"filing_date":"2019-03-05T00:00:00.000Z","publication_date":"2022-04-05T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":7,"abstract":"Techniques facilitating forming a backside ground or power plane in stacked vertical transport field effect transistor are provided. A semiconductor structure can include a first field effect transistor (FET). The semiconductor structure can also include a second FET. The first FET can be vertically stacked on a first surface of the second FET. The second FET can be electrically coupled to a conductive plane on a second surface of the second FET, the second surface being opposite to the first surface."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Forming a backside ground or power plane in a stacked vertical transport field effect transistor","description":"Techniques facilitating forming a backside ground or power plane in stacked vertical transport field effect transistor are provided. A semiconductor structure can include a first field effect transist","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11295985","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11295985","citation_suggestion":"Patentable. \"Forming a backside ground or power plane in a stacked vertical transport field effect transistor\" (US-11295985). https://patentable.app/patents/US-11295985","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11295985","json":"https://patentable.app/api/llm-context/US-11295985","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:38:12.202Z"}