{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11296033","patent":{"patent_number":"US-11296033","title":"Fan-out multi-device hybrid integrated flexible micro system and fabrication method thereof","assignee":null,"inventors":[],"filing_date":"2018-12-11T00:00:00.000Z","publication_date":"2022-04-05T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":7,"abstract":"The invention discloses a fan-out multi-device hybrid integrated flexible micro-system and an associated fabrication method in the field of microelectronics. The flexible microsystem uses microelectromechanical system (MEMS) chips and/or integrated circuit (IC) chips as the device units, flexible isolation trenches filled with flexible polymer as a flexible connection between the device units, and metal wiring layers to provide electrical interconnections between the device units. The disclosed multi-device hybrid integrated flexible micro-system completed by a fan-out method not only retains excellent electrical performance of silicon-based devices, but also realizes flexibility of the overall micro-system, and has stable structure and reliable performance."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Fan-out multi-device hybrid integrated flexible micro system and fabrication method thereof","description":"The invention discloses a fan-out multi-device hybrid integrated flexible micro-system and an associated fabrication method in the field of microelectronics. The flexible microsystem uses microelectro","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11296033","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11296033","citation_suggestion":"Patentable. \"Fan-out multi-device hybrid integrated flexible micro system and fabrication method thereof\" (US-11296033). https://patentable.app/patents/US-11296033","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11296033","json":"https://patentable.app/api/llm-context/US-11296033","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T21:21:34.770Z"}