{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11298795","patent":{"patent_number":"US-11298795","title":"Polishing pad, process for preparing the same, and process for preparing a semiconductor device using the same","assignee":null,"inventors":[],"filing_date":"2020-08-25T00:00:00.000Z","publication_date":"2022-04-12T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":6,"abstract":"Embodiments relate to a polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, a process for preparing the same, and a process for preparing a semiconductor device using the same. In the polishing pad according to the embodiment, the size (or diameter) and distribution of a plurality of pores are adjusted, whereby the polishing performance such as polishing rate and within-wafer non-uniformity can be further enhanced."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Polishing pad, process for preparing the same, and process for preparing a semiconductor device using the same","description":"Embodiments relate to a polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, a process for preparing the same, and a process for preparing a semiconductor devi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11298795","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11298795","citation_suggestion":"Patentable. \"Polishing pad, process for preparing the same, and process for preparing a semiconductor device using the same\" (US-11298795). https://patentable.app/patents/US-11298795","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11298795","json":"https://patentable.app/api/llm-context/US-11298795","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:42:14.892Z"}