{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11302513","patent":{"patent_number":"US-11302513","title":"Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus","assignee":null,"inventors":[],"filing_date":"2019-04-05T00:00:00.000Z","publication_date":"2022-04-12T00:00:00.000Z","cpc_codes":["G01N","G06T","G06T","G06T","G06T","G01N","G01N","G01N","G01N","G06T","G06T"],"num_claims":8,"abstract":"An electron microscope apparatus includes a detection unit that detects reflected electrons reflected from a sample when the sample is irradiated with primary electrons emitted by a primary electron generation unit (electron gun), an image generation unit that generates an image of a surface of the sample with the reflected electrons based on output from the detection unit, and a processing unit that generates a differential waveform signal of the image generated by the image generation unit, processes the image by using information of the differential waveform signal, and measures a dimension of a pattern formed on the sample."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus","description":"An electron microscope apparatus includes a detection unit that detects reflected electrons reflected from a sample when the sample is irradiated with primary electrons emitted by a primary electron g","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11302513","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11302513","citation_suggestion":"Patentable. \"Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus\" (US-11302513). https://patentable.app/patents/US-11302513","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11302513","json":"https://patentable.app/api/llm-context/US-11302513","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:59:15.889Z"}