{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11302825","patent":{"patent_number":"US-11302825","title":"Self-aligned spacers for multi-gate devices and method of fabrication thereof","assignee":null,"inventors":[],"filing_date":"2019-10-17T00:00:00.000Z","publication_date":"2022-04-12T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":20,"abstract":"A semiconductor device includes a substrate; a channel member above the substrate; a gate structure wrapping the channel member; a source/drain (S/D) feature abutting the channel member; and an inner spacer interposing the S/D feature and the gate structure, wherein a first sidewall of the inner spacer facing the gate structure has a curvature surface in a cross-sectional view perpendicular to a top surface of the substrate and along a lengthwise direction of the channel member."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Self-aligned spacers for multi-gate devices and method of fabrication thereof","description":"A semiconductor device includes a substrate; a channel member above the substrate; a gate structure wrapping the channel member; a source/drain (S/D) feature abutting the channel member; and an inner ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11302825","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11302825","citation_suggestion":"Patentable. \"Self-aligned spacers for multi-gate devices and method of fabrication thereof\" (US-11302825). https://patentable.app/patents/US-11302825","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11302825","json":"https://patentable.app/api/llm-context/US-11302825","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:53:20.648Z"}