{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11306388","patent":{"patent_number":"US-11306388","title":"Sputtering targets and devices including Mo, Nb, and Ta, and methods","assignee":null,"inventors":[],"filing_date":"2018-08-29T00:00:00.000Z","publication_date":"2022-04-19T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":11,"abstract":"Sputtering targets including molybdenum, niobium and tantalum are found to be useful for sputtering films for electronic devices. Sputtering targets with about 88 to 97 weight percent molybdenum show improved performance, particularly with respect to etching, such as when simultaneously etching an alloy layer including the Mo, Nb, and Ta, and a metal layer (e.g., an aluminum layer). The targets are particularly useful in manufacturing touch screen devices."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sputtering targets and devices including Mo, Nb, and Ta, and methods","description":"Sputtering targets including molybdenum, niobium and tantalum are found to be useful for sputtering films for electronic devices. Sputtering targets with about 88 to 97 weight percent molybdenum show ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11306388","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11306388","citation_suggestion":"Patentable. \"Sputtering targets and devices including Mo, Nb, and Ta, and methods\" (US-11306388). https://patentable.app/patents/US-11306388","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11306388","json":"https://patentable.app/api/llm-context/US-11306388","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:39:02.954Z"}