{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11307125","patent":{"patent_number":"US-11307125","title":"MEMS nanoindenter chip with indenter probe and reference probe","assignee":null,"inventors":[],"filing_date":"2018-11-20T00:00:00.000Z","publication_date":"2022-04-19T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":13,"abstract":"A MEMS-nanoindenter chip performs nanoindentation on a specimen. The MEMS-nanoindenter chip has an intender probe joined with an indenter tip. The indenter tip indents into the specimen. A reference probe is joined with a reference tip, the reference tip touches the specimen. Sensing capabilities are provided to measure the position of the indenter probe relative to the reference probe. The MEMS-nanoindenter chip enables highly accurate measurements since the frame stiffness is not part of the measurement chain any more. Furthermore, thermal drift during the nanoindentation is considerably reduced."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS nanoindenter chip with indenter probe and reference probe","description":"A MEMS-nanoindenter chip performs nanoindentation on a specimen. The MEMS-nanoindenter chip has an intender probe joined with an indenter tip. The indenter tip indents into the specimen. A reference p","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11307125","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11307125","citation_suggestion":"Patentable. \"MEMS nanoindenter chip with indenter probe and reference probe\" (US-11307125). https://patentable.app/patents/US-11307125","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11307125","json":"https://patentable.app/api/llm-context/US-11307125","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:17:39.109Z"}