{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11461889","patent":{"patent_number":"US-11461889","title":"Pattern inspection apparatus and pattern inspection method","assignee":null,"inventors":[],"filing_date":"2020-09-17T00:00:00.000Z","publication_date":"2022-10-04T00:00:00.000Z","cpc_codes":["G06T","G01N","G01N","G01N","G06T","G06T","G06T","G06T","G06T","G01N","G01N","G06T","G06T"],"num_claims":12,"abstract":"According to one aspect of the present invention, a pattern inspection apparatus includes: a profile extraction circuit configured to extract each of a plurality of predetermined dimensional profiles for a plurality of pixels with a value of a differential intensity greater than or equal to a threshold value in the image; a wavelet transform circuit configured to perform, on each of the plurality of predetermined dimensional profiles, a wavelet transform while changing a scale variable of a mother wavelet function to a predetermined value; and a contour position extraction circuit configured to extract, for the each of the plurality of predetermined dimensional profiles, a maximum peak position as a contour position of the figure pattern from peak positions of a plurality of transformed profiles of after the wavelet transform in which the scale variable is set."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Pattern inspection apparatus and pattern inspection method","description":"According to one aspect of the present invention, a pattern inspection apparatus includes: a profile extraction circuit configured to extract each of a plurality of predetermined dimensional profiles ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11461889","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11461889","citation_suggestion":"Patentable. \"Pattern inspection apparatus and pattern inspection method\" (US-11461889). https://patentable.app/patents/US-11461889","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11461889","json":"https://patentable.app/api/llm-context/US-11461889","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T17:59:21.234Z"}