{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11462404","patent":{"patent_number":"US-11462404","title":"Imprint apparatus and method of manufacturing article","assignee":null,"inventors":[],"filing_date":"2019-04-19T00:00:00.000Z","publication_date":"2022-10-04T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":17,"abstract":"An imprint apparatus forms a pattern on a substrate by an imprint process which includes a process of bringing an imprint material on the substrate into contact with a mold, a process of curing the imprint material, and a separating process of separating a cured product of the imprint material and the mold. The apparatus includes a substrate holding mechanism which includes a substrate chuck configured to chuck the substrate by sucking the substrate. The substrate chuck has a through hole, and the substrate holding mechanism suppresses a state in which a suction force by which the substrate chuck sucks the substrate is reduced due to the through hole and a gap which is formed between a back surface of the substrate and an upper surface of the substrate chuck in the separating process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Imprint apparatus and method of manufacturing article","description":"An imprint apparatus forms a pattern on a substrate by an imprint process which includes a process of bringing an imprint material on the substrate into contact with a mold, a process of curing the im","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11462404","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11462404","citation_suggestion":"Patentable. \"Imprint apparatus and method of manufacturing article\" (US-11462404). https://patentable.app/patents/US-11462404","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11462404","json":"https://patentable.app/api/llm-context/US-11462404","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:59:53.465Z"}