{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11462414","patent":{"patent_number":"US-11462414","title":"Atomic layer etching of metal oxides","assignee":null,"inventors":[],"filing_date":"2021-03-08T00:00:00.000Z","publication_date":"2022-10-04T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":21,"abstract":"In one example, a method of processing a substrate includes loading the substrate in a process chamber, where the substrate includes a metal oxide containing film to be etched. The method further includes performing of an atomic layer etching including a plurality of cyclic processes, each of the plurality of cyclic processes including exposing the metal oxide containing film to a first gas stream including boron trichloride (BCl3), and exposing the metal oxide containing film to a second gas stream including borane, amine, alcohol, carboxylic acid, carboxamide, or beta-diketone reagent."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Atomic layer etching of metal oxides","description":"In one example, a method of processing a substrate includes loading the substrate in a process chamber, where the substrate includes a metal oxide containing film to be etched. The method further incl","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11462414","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11462414","citation_suggestion":"Patentable. \"Atomic layer etching of metal oxides\" (US-11462414). https://patentable.app/patents/US-11462414","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11462414","json":"https://patentable.app/api/llm-context/US-11462414","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:43:10.256Z"}