{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11466787","patent":{"patent_number":"US-11466787","title":"Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article","assignee":null,"inventors":[],"filing_date":"2020-12-02T00:00:00.000Z","publication_date":"2022-10-11T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":7,"abstract":"The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port; and a pressing member configured to press the valve element toward a side of the first port."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article","description":"The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selecti","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11466787","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11466787","citation_suggestion":"Patentable. \"Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article\" (US-11466787). https://patentable.app/patents/US-11466787","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11466787","json":"https://patentable.app/api/llm-context/US-11466787","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T17:42:33.958Z"}