{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11467084","patent":{"patent_number":"US-11467084","title":"Methods for polysilicon characterization","assignee":null,"inventors":[],"filing_date":"2019-12-06T00:00:00.000Z","publication_date":"2022-10-11T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"Aspects of the disclosure provide methods for polysilicon characterization. The method includes receiving image data of a polysilicon structure formed on a sample substrate. The image data is in a spatial domain and is generated by transmission electron microscopy (TEM). Further, the method includes extracting frequency spectrum of the image data in a frequency domain. Then, the method includes selecting a subset of the frequency spectrum that corresponds to characteristic of first crystal grains that are of a first orientation, and transforming the selected subset of the frequency spectrum to the spatial domain to construct a first spatial image for the first crystal grains of the first orientation."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods for polysilicon characterization","description":"Aspects of the disclosure provide methods for polysilicon characterization. The method includes receiving image data of a polysilicon structure formed on a sample substrate. The image data is in a spa","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11467084","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11467084","citation_suggestion":"Patentable. \"Methods for polysilicon characterization\" (US-11467084). https://patentable.app/patents/US-11467084","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11467084","json":"https://patentable.app/api/llm-context/US-11467084","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T17:18:56.831Z"}