{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11467131","patent":{"patent_number":"US-11467131","title":"Systems and methods for detecting resonant frequency of MEMS mirrors","assignee":null,"inventors":[],"filing_date":"2020-06-19T00:00:00.000Z","publication_date":"2022-10-11T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01S","G01S","G01N"],"num_claims":20,"abstract":"Embodiments of the disclosure provide systems and methods for detecting a resonant frequency of an optical beam-steering device. The method may include driving the optical beam-steering device with a driving signal oscillating at a plurality of frequencies. The method may also include detecting, by an acoustic detector, an acoustic signal caused by a movement of the optical beam-steering device. The method may further include analyzing a spectrum, by a controller, of the acoustic signal. The method may additionally include determining, by the controller, the resonant frequency of the optical beam-steering device based on the spectrum."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and methods for detecting resonant frequency of MEMS mirrors","description":"Embodiments of the disclosure provide systems and methods for detecting a resonant frequency of an optical beam-steering device. The method may include driving the optical beam-steering device with a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11467131","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11467131","citation_suggestion":"Patentable. \"Systems and methods for detecting resonant frequency of MEMS mirrors\" (US-11467131). https://patentable.app/patents/US-11467131","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11467131","json":"https://patentable.app/api/llm-context/US-11467131","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T04:20:34.076Z"}