{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11467608","patent":{"patent_number":"US-11467608","title":"Systems and methods for flow sensor back pressure adjustment for mass flow controller","assignee":null,"inventors":[],"filing_date":"2021-04-08T00:00:00.000Z","publication_date":"2022-10-11T00:00:00.000Z","cpc_codes":["G05D","G05D","G05D","G05D"],"num_claims":19,"abstract":"A mass flow control apparatus is capable of controlling a flow rate of a fluid to a tool. Pressure of the fluid is regulated by a solenoid valve, which receives signals from a control module. Various set points may be inputted to the control module, whereby control module receives pressure sensor signals from across a flow restrictor and adjusts the solenoid valve to control the fluid flow rate to equal a set point."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and methods for flow sensor back pressure adjustment for mass flow controller","description":"A mass flow control apparatus is capable of controlling a flow rate of a fluid to a tool. Pressure of the fluid is regulated by a solenoid valve, which receives signals from a control module. Various ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11467608","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11467608","citation_suggestion":"Patentable. \"Systems and methods for flow sensor back pressure adjustment for mass flow controller\" (US-11467608). https://patentable.app/patents/US-11467608","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11467608","json":"https://patentable.app/api/llm-context/US-11467608","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:17:47.954Z"}