{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11469233","patent":{"patent_number":"US-11469233","title":"Method for preparing a memory device with air gaps for reducing capacitive coupling","assignee":null,"inventors":[],"filing_date":"2020-06-25T00:00:00.000Z","publication_date":"2022-10-11T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":8,"abstract":"The present application provides a method for preparing a memory device. The method includes: forming an active region in a substrate, forming a word line in the substrate, wherein the word line is intersected with the active region; forming a contact structure on the substrate, wherein the contact structure is located at a side of the word line, and electrically connected to the active region; sequentially forming a first conductive layer and a second conductive layer over the substrate, wherein the contact structure is covered by the first and second conductive layers; patterning the first and second conductive layers to form a conductive pillar and a landing pad, respectively, wherein the conductive pillar is overlapped with and electrically connected to the contact structure, the landing pad covers and electrically connects to the conductive pillar, and a sidewall of the conductive pillar is laterally recessed from a sidewall of the landing pad; and forming a dielectric layer to laterally surround the conductive pillar and the landing pad."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for preparing a memory device with air gaps for reducing capacitive coupling","description":"The present application provides a method for preparing a memory device. The method includes: forming an active region in a substrate, forming a word line in the substrate, wherein the word line is in","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11469233","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11469233","citation_suggestion":"Patentable. \"Method for preparing a memory device with air gaps for reducing capacitive coupling\" (US-11469233). https://patentable.app/patents/US-11469233","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11469233","json":"https://patentable.app/api/llm-context/US-11469233","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:22:45.228Z"}