{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11479849","patent":{"patent_number":"US-11479849","title":"Physical vapor deposition chamber with target surface morphology monitor","assignee":null,"inventors":[],"filing_date":"2019-06-03T00:00:00.000Z","publication_date":"2022-10-25T00:00:00.000Z","cpc_codes":["G06N"],"num_claims":20,"abstract":"A sputtering system includes a vacuum chamber, a power source having a pole coupled to a backing plate for holding a sputtering target within the vacuum chamber, a pedestal for holding a substrate within the vacuum chamber, and a time of flight camera positioned to scan a surface of a target held to the backing plate. The time of flight camera may be used to obtain information relating to the topography of the target while the target is at sub-atmospheric pressure. The target information may be used to manage operation of the sputtering system. Managing operation of the sputtering system may include setting an adjustable parameter of a deposition process or deciding when to replace a sputtering target. Machine learning may be used to apply the time of flight camera data in managing the sputtering system operation."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Physical vapor deposition chamber with target surface morphology monitor","description":"A sputtering system includes a vacuum chamber, a power source having a pole coupled to a backing plate for holding a sputtering target within the vacuum chamber, a pedestal for holding a substrate wit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11479849","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11479849","citation_suggestion":"Patentable. \"Physical vapor deposition chamber with target surface morphology monitor\" (US-11479849). https://patentable.app/patents/US-11479849","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11479849","json":"https://patentable.app/api/llm-context/US-11479849","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T21:25:14.937Z"}