{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11482416","patent":{"patent_number":"US-11482416","title":"Vapor phase growth method","assignee":null,"inventors":[],"filing_date":"2020-02-12T00:00:00.000Z","publication_date":"2022-10-25T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"A substrate is mounted on a rotator provided in a reaction chamber, while a first process gas containing no source gas is supplied to an upper surface of the substrate from above the substrate and the substrate is rotated at 300 rpm or more, a temperature of a wall surface is changed, and after a temperature of the substrate is allowed to rise, the substrate is controlled to a predetermined film formation temperature and a second process gas containing a source gas is supplied to the upper surface of the substrate from above the substrate to grow an SiC film on the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Vapor phase growth method","description":"A substrate is mounted on a rotator provided in a reaction chamber, while a first process gas containing no source gas is supplied to an upper surface of the substrate from above the substrate and the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11482416","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11482416","citation_suggestion":"Patentable. \"Vapor phase growth method\" (US-11482416). https://patentable.app/patents/US-11482416","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11482416","json":"https://patentable.app/api/llm-context/US-11482416","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:45:19.911Z"}