{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11485630","patent":{"patent_number":"US-11485630","title":"Micromechanical sensor","assignee":null,"inventors":[],"filing_date":"2019-06-06T00:00:00.000Z","publication_date":"2022-11-01T00:00:00.000Z","cpc_codes":["G01C"],"num_claims":10,"abstract":"A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Micromechanical sensor","description":"A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure th","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11485630","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11485630","citation_suggestion":"Patentable. \"Micromechanical sensor\" (US-11485630). https://patentable.app/patents/US-11485630","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11485630","json":"https://patentable.app/api/llm-context/US-11485630","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:59:39.368Z"}