{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11487304","patent":{"patent_number":"US-11487304","title":"Process fluid path switching in recipe operations","assignee":null,"inventors":[],"filing_date":"2021-01-08T00:00:00.000Z","publication_date":"2022-11-01T00:00:00.000Z","cpc_codes":["G05D","G05B","G05D","G05B","G05B"],"num_claims":20,"abstract":"A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers: causing the process fluid to flow to the processing chamber for a first period of time corresponding to a first time value; and causing the process fluid to flow to a divert foreline of the processing chamber for a second period of time, the second period of time being based on a timestep of the operation and the time value."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Process fluid path switching in recipe operations","description":"A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11487304","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11487304","citation_suggestion":"Patentable. \"Process fluid path switching in recipe operations\" (US-11487304). https://patentable.app/patents/US-11487304","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11487304","json":"https://patentable.app/api/llm-context/US-11487304","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T03:57:14.507Z"}