{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11490186","patent":{"patent_number":"US-11490186","title":"Edge patterns of microelectromechanical systems (MEMS) microphone backplate holes","assignee":null,"inventors":[],"filing_date":"2021-03-24T00:00:00.000Z","publication_date":"2022-11-01T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R"],"num_claims":16,"abstract":"Robust microelectromechanical systems (MEMS) sensors and related manufacturing techniques are described. Disclosed MEMS membranes and backplate structures facilitate manufacturing robust MEMS microphones. Exemplary MEMS membranes and backplate structures can comprise edge pattern holes having a length to width ratio greater than one and/or configured in a radial arrangement. Disclosed implementations can facilitate providing robust MEMS membranes and backplate structures, having edge pattern holes with a profile resembling at least one of an oval, an egg, an ellipse, a droplet, a cone, or a capsule or similar suitable configurations according to disclosed embodiments."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Edge patterns of microelectromechanical systems (MEMS) microphone backplate holes","description":"Robust microelectromechanical systems (MEMS) sensors and related manufacturing techniques are described. Disclosed MEMS membranes and backplate structures facilitate manufacturing robust MEMS micropho","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11490186","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11490186","citation_suggestion":"Patentable. \"Edge patterns of microelectromechanical systems (MEMS) microphone backplate holes\" (US-11490186). https://patentable.app/patents/US-11490186","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11490186","json":"https://patentable.app/api/llm-context/US-11490186","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:34:54.014Z"}