{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11493609","patent":{"patent_number":"US-11493609","title":"MEMS device with integrated mirror position sensor","assignee":null,"inventors":[],"filing_date":"2019-12-27T00:00:00.000Z","publication_date":"2022-11-08T00:00:00.000Z","cpc_codes":["G01S"],"num_claims":8,"abstract":"Methods and systems for using a dual sided MEMS mirror for determining a direction of a LiDAR beam are disclosed. In one example a MEMS package includes a dual sided MEMS mirror that is manipulable about two orthogonal axes. A first surface of the MEMS mirror is used to steer a LiDAR beam that is used to perform LiDAR imaging of an area of interest. As the mirror is moved, a second surface of the mirror reflects a sensing beam onto a position sensitive device. Data from the position sensitive device is used to determine a position of the mirror which can be used to determine a direction of the steered LiDAR beam."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS device with integrated mirror position sensor","description":"Methods and systems for using a dual sided MEMS mirror for determining a direction of a LiDAR beam are disclosed. In one example a MEMS package includes a dual sided MEMS mirror that is manipulable ab","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11493609","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11493609","citation_suggestion":"Patentable. \"MEMS device with integrated mirror position sensor\" (US-11493609). https://patentable.app/patents/US-11493609","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11493609","json":"https://patentable.app/api/llm-context/US-11493609","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:37:07.463Z"}