{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11495602","patent":{"patent_number":"US-11495602","title":"Method and device for determining fabrication chamber","assignee":null,"inventors":[],"filing_date":"2022-01-12T00:00:00.000Z","publication_date":"2022-11-08T00:00:00.000Z","cpc_codes":["G05B","G06Q","H01L","H01L"],"num_claims":15,"abstract":"Embodiments of the present disclosure provide a method and a device for determining a fabrication chamber. According to a current radio frequency power time of each of the fabrication chambers corresponding to adjacent process steps and service phases divided based on a service period of the fabrication chambers, a service phase is determined for the current radio frequency power time of each of the fabrication chambers. For target objects processed by the fabrication chambers in the current process step, fabrication chambers for the target objects to enter in a next process step are directly determined according to the service phase of the current radio frequency power time of each of the fabrication chambers."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and device for determining fabrication chamber","description":"Embodiments of the present disclosure provide a method and a device for determining a fabrication chamber. According to a current radio frequency power time of each of the fabrication chambers corresp","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11495602","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11495602","citation_suggestion":"Patentable. \"Method and device for determining fabrication chamber\" (US-11495602). https://patentable.app/patents/US-11495602","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11495602","json":"https://patentable.app/api/llm-context/US-11495602","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:22:51.869Z"}