{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11498830","patent":{"patent_number":"US-11498830","title":"Structure of micro-electro-mechanical-system microphone and method for fabricating the same","assignee":null,"inventors":[],"filing_date":"2020-03-09T00:00:00.000Z","publication_date":"2022-11-15T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R","H04R","H04R","H04R"],"num_claims":19,"abstract":"The invention provides a MEMS microphone. The MEMS microphone includes a substrate, having a first opening. A dielectric layer is disposed on the substrate, wherein the dielectric layer has a second opening aligned to the first opening. A diaphragm is disposed within the second opening of the dielectric layer, wherein a peripheral region of the diaphragm is embedded into the dielectric layer at sidewall of the second opening. A backplate layer is disposed on the dielectric layer and covering over the second opening. The backplate layer includes a plurality of acoustic holes arranged into a regular array pattern. The regular array pattern comprises a pattern unit, the pattern unit comprises one of the acoustic holes as a center hole, and peripheral holes of the acoustic holes surrounding the center hole with a same pitch to the center hole."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Structure of micro-electro-mechanical-system microphone and method for fabricating the same","description":"The invention provides a MEMS microphone. The MEMS microphone includes a substrate, having a first opening. A dielectric layer is disposed on the substrate, wherein the dielectric layer has a second o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11498830","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11498830","citation_suggestion":"Patentable. \"Structure of micro-electro-mechanical-system microphone and method for fabricating the same\" (US-11498830). https://patentable.app/patents/US-11498830","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11498830","json":"https://patentable.app/api/llm-context/US-11498830","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T12:46:18.619Z"}