{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11500137","patent":{"patent_number":"US-11500137","title":"Multilayer mirror for reflecting EUV radiation and method for producing the same","assignee":null,"inventors":[],"filing_date":"2017-09-25T00:00:00.000Z","publication_date":"2022-11-15T00:00:00.000Z","cpc_codes":["B82Y","G01N"],"num_claims":13,"abstract":"A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Multilayer mirror for reflecting EUV radiation and method for producing the same","description":"A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plural","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11500137","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11500137","citation_suggestion":"Patentable. \"Multilayer mirror for reflecting EUV radiation and method for producing the same\" (US-11500137). https://patentable.app/patents/US-11500137","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11500137","json":"https://patentable.app/api/llm-context/US-11500137","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:23:32.171Z"}