{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11508546","patent":{"patent_number":"US-11508546","title":"System and method for low-noise edge detection and its use for process monitoring and control","assignee":null,"inventors":[],"filing_date":"2021-03-12T00:00:00.000Z","publication_date":"2022-11-22T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06T","G06T","G06T","G06T","G06T"],"num_claims":20,"abstract":"In one embodiment, a method includes generating a model trained to predict a low-probability stochastic defect, calibrating, using unbiased measurement data, the model to a specific lithography process, patterning process, or both to generate a calibrated model, using the calibrated model to predict the low-probability stochastic defect; and modifying, based on the low-probability stochastic defect, a variable, parameter, setting, or some combination of a manufacturing process of a device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method for low-noise edge detection and its use for process monitoring and control","description":"In one embodiment, a method includes generating a model trained to predict a low-probability stochastic defect, calibrating, using unbiased measurement data, the model to a specific lithography proces","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11508546","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11508546","citation_suggestion":"Patentable. \"System and method for low-noise edge detection and its use for process monitoring and control\" (US-11508546). https://patentable.app/patents/US-11508546","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11508546","json":"https://patentable.app/api/llm-context/US-11508546","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:23:33.725Z"}