{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11508551","patent":{"patent_number":"US-11508551","title":"Detection and correction of system responses in real-time","assignee":null,"inventors":[],"filing_date":"2019-11-22T00:00:00.000Z","publication_date":"2022-11-22T00:00:00.000Z","cpc_codes":["G01N","G06N","H01L","G06N","G06N","G06N","G06N"],"num_claims":20,"abstract":"A detection and correction method for an electron beam system are provided. The method includes emitting an electron beam towards a specimen; modulating a beam current of the electron beam to obtain a beam signal. The method further includes detecting, using an electron detector, secondary and/or backscattered electrons emitted by the specimen to obtain electron data, wherein the electron data defines a detection signal. The method further includes determining, using a processor, a phase shift between the beam signal and the detection signal. The method further includes filtering, using the processor, the detection signal based on the phase shift."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Detection and correction of system responses in real-time","description":"A detection and correction method for an electron beam system are provided. The method includes emitting an electron beam towards a specimen; modulating a beam current of the electron beam to obtain a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11508551","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11508551","citation_suggestion":"Patentable. \"Detection and correction of system responses in real-time\" (US-11508551). https://patentable.app/patents/US-11508551","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11508551","json":"https://patentable.app/api/llm-context/US-11508551","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:45:03.620Z"}