{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11513081","patent":{"patent_number":"US-11513081","title":"Substrate inspection method, substrate treatment system, and computer storage medium","assignee":null,"inventors":[],"filing_date":"2019-11-20T00:00:00.000Z","publication_date":"2022-11-29T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L","H01L"],"num_claims":10,"abstract":"A substrate inspection method in a substrate treatment system including a plurality of treatment apparatuses each performing a predetermined treatment on a substrate, includes: imaging a surface of a substrate before being treated in the treatment apparatuses to acquire a first substrate image; extracting a predetermined feature amount from the first substrate image; selecting an inspection recipe corresponding to the feature amount extracted from the first substrate image, from a storage unit in which a plurality of inspection recipes each set corresponding to the feature amount in a different range are stored; imaging the surface of the substrate after being treated in the treatment apparatuses to acquire a second substrate image; and determining presence or absence of a defect of the substrate, based on the selected inspection recipe and the second substrate image."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate inspection method, substrate treatment system, and computer storage medium","description":"A substrate inspection method in a substrate treatment system including a plurality of treatment apparatuses each performing a predetermined treatment on a substrate, includes: imaging a surface of a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11513081","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11513081","citation_suggestion":"Patentable. \"Substrate inspection method, substrate treatment system, and computer storage medium\" (US-11513081). https://patentable.app/patents/US-11513081","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11513081","json":"https://patentable.app/api/llm-context/US-11513081","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:09:39.629Z"}