{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11513108","patent":{"patent_number":"US-11513108","title":"Method and apparatus for pulse gas delivery with concentration measurement","assignee":null,"inventors":[],"filing_date":"2020-01-14T00:00:00.000Z","publication_date":"2022-11-29T00:00:00.000Z","cpc_codes":["G01N","G05D","G01N","G05D","G05D","G05D","H01L"],"num_claims":14,"abstract":"A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for pulse gas delivery with concentration measurement","description":"A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11513108","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11513108","citation_suggestion":"Patentable. \"Method and apparatus for pulse gas delivery with concentration measurement\" (US-11513108). https://patentable.app/patents/US-11513108","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11513108","json":"https://patentable.app/api/llm-context/US-11513108","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T17:06:00.733Z"}