{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11513194","patent":{"patent_number":"US-11513194","title":"Ranging apparatus and method using the ranging apparatus","assignee":null,"inventors":[],"filing_date":"2019-07-19T00:00:00.000Z","publication_date":"2022-11-29T00:00:00.000Z","cpc_codes":["G01S","G01S","G01S","G01S"],"num_claims":3,"abstract":"A ranging apparatus for use in a plasma processing chamber having an internal space and a window is disclosed. The ranging apparatus includes at least one external light emitting device disposed external to the plasma processing chamber. The external light emitting device emits at least one source light beam to the internal space through the window. The ranging apparatus includes a base wafer disposed on a stage in the internal space. The ranging apparatus includes at least one optical circuit fixed to the base wafer. The optical circuit deflects the source light beam to a target in the internal space, and deflects a reflection light beam to the window. The ranging apparatus includes at least one external light receiving device disposed external to the plasma processing chamber. The external light receiving device receives the deflected reflection light beam through the window."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Ranging apparatus and method using the ranging apparatus","description":"A ranging apparatus for use in a plasma processing chamber having an internal space and a window is disclosed. The ranging apparatus includes at least one external light emitting device disposed exter","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11513194","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11513194","citation_suggestion":"Patentable. \"Ranging apparatus and method using the ranging apparatus\" (US-11513194). https://patentable.app/patents/US-11513194","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11513194","json":"https://patentable.app/api/llm-context/US-11513194","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T21:24:33.500Z"}