{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11515141","patent":{"patent_number":"US-11515141","title":"Cleaning method in inspection apparatus, and the inspection apparatus","assignee":null,"inventors":[],"filing_date":"2020-03-02T00:00:00.000Z","publication_date":"2022-11-29T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":9,"abstract":"A cleaning method in an inspection apparatus that performs an electrical characteristic inspection on a device under test formed in an inspection object, includes: transferring, in a transfer process, a stage on which the inspection object is mounted to a position facing a probe card having probes, the probes being brought into contact with the device under test during the electrical characteristic inspection; subsequently, exhausting and depressurizing a space between the probe card and the stage facing the probe card in a peeling-off preparation process; introducing a gas into the space which has been depressurized and peeling off foreign substances adhering to a front surface of the stage and the probes in a foreign substance peeling-off process; and exhausting the space to discharge the foreign substances while continuously introducing the gas into the space in a foreign substance discharging process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Cleaning method in inspection apparatus, and the inspection apparatus","description":"A cleaning method in an inspection apparatus that performs an electrical characteristic inspection on a device under test formed in an inspection object, includes: transferring, in a transfer process,","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11515141","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11515141","citation_suggestion":"Patentable. \"Cleaning method in inspection apparatus, and the inspection apparatus\" (US-11515141). https://patentable.app/patents/US-11515141","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11515141","json":"https://patentable.app/api/llm-context/US-11515141","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:50:17.910Z"}