{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11515194","patent":{"patent_number":"US-11515194","title":"Substrate processing apparatus, substrate processing system, and substrate transporting method","assignee":null,"inventors":[],"filing_date":"2020-06-10T00:00:00.000Z","publication_date":"2022-11-29T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":5,"abstract":"A substrate processing apparatus includes a stage including a first section and a second section, pins, a lifter configured to raise and lower the pins, and a controller configured to control the lifter. On the first section, a substrate is placed. On the second section, an edge ring is placed. The second section is provided at a periphery of the first section. Also, at the second section, holes are provided. The pins are provided in the respective holes so as to move up and down through the holes."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus, substrate processing system, and substrate transporting method","description":"A substrate processing apparatus includes a stage including a first section and a second section, pins, a lifter configured to raise and lower the pins, and a controller configured to control the lift","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11515194","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11515194","citation_suggestion":"Patentable. \"Substrate processing apparatus, substrate processing system, and substrate transporting method\" (US-11515194). https://patentable.app/patents/US-11515194","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11515194","json":"https://patentable.app/api/llm-context/US-11515194","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T03:23:26.845Z"}