{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11515218","patent":{"patent_number":"US-11515218","title":"Thermal profile monitoring wafer and methods of monitoring temperature","assignee":null,"inventors":[],"filing_date":"2020-04-07T00:00:00.000Z","publication_date":"2022-11-29T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H04N","H04N","H04N","H04N","H01L"],"num_claims":17,"abstract":"Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to produce an image of at least a portion of a wafer support, the image representative of the temperature within the field of view. Methods of using the thermal monitors are also described."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Thermal profile monitoring wafer and methods of monitoring temperature","description":"Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to p","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11515218","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11515218","citation_suggestion":"Patentable. \"Thermal profile monitoring wafer and methods of monitoring temperature\" (US-11515218). https://patentable.app/patents/US-11515218","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11515218","json":"https://patentable.app/api/llm-context/US-11515218","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:06:39.397Z"}