{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11522063","patent":{"patent_number":"US-11522063","title":"Shield gate trench power device and method for making the same","assignee":null,"inventors":[],"filing_date":"2021-04-15T00:00:00.000Z","publication_date":"2022-12-06T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":15,"abstract":"A shield gate trench power device, wherein a shield dielectric layer is formed by stacking a thermal oxide layer and a CVD dielectric layer on the inner side surface of a gate trench; a gap region formed by means of filling with the shield dielectric layer is filled with source polysilicon; a top trench is formed on two sides of the source polysilicon by etching a portion of the shield dielectric layer close to the side surface of the gate trench, and the entire top trench is located in the thermal oxide layer; the top trench is filled with a polysilicon gate. A method for manufacturing a shield gate trench power device. The uniformity of the thickness of the shield dielectric layer on the sidewall and bottom of the gate trench can be improved."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Shield gate trench power device and method for making the same","description":"A shield gate trench power device, wherein a shield dielectric layer is formed by stacking a thermal oxide layer and a CVD dielectric layer on the inner side surface of a gate trench; a gap region for","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11522063","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11522063","citation_suggestion":"Patentable. \"Shield gate trench power device and method for making the same\" (US-11522063). https://patentable.app/patents/US-11522063","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11522063","json":"https://patentable.app/api/llm-context/US-11522063","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:55:50.025Z"}