{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11525668","patent":{"patent_number":"US-11525668","title":"Apparatus and method for metrology","assignee":null,"inventors":[],"filing_date":"2021-01-04T00:00:00.000Z","publication_date":"2022-12-13T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","H01L"],"num_claims":20,"abstract":"A method of performing metrology analysis of a thin film includes coupling a radiation into an optical element disposed adjacent to a surface of the thin film. The radiation is coupled such that the radiation is totally internally reflected at an interface between the optical element and the thin film. An evanescent radiation generated at the interface penetrates the thin film. The method furthers include analyzing the evanescent radiation scattered by the thin film to obtain properties of the thin film."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for metrology","description":"A method of performing metrology analysis of a thin film includes coupling a radiation into an optical element disposed adjacent to a surface of the thin film. The radiation is coupled such that the r","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11525668","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11525668","citation_suggestion":"Patentable. \"Apparatus and method for metrology\" (US-11525668). https://patentable.app/patents/US-11525668","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11525668","json":"https://patentable.app/api/llm-context/US-11525668","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:14:46.690Z"}