{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11526088","patent":{"patent_number":"US-11526088","title":"Coaxial see-through alignment imaging system","assignee":null,"inventors":[],"filing_date":"2021-08-17T00:00:00.000Z","publication_date":"2022-12-13T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06V","H01L","H01L","G01N","G06T","G06T","G06T","G06T","G06V","H01L","H04N"],"num_claims":9,"abstract":"Aspects of the present disclosure provide an imaging system. For example, in the imaging system a first light source can generate a first light beam of a first wavelength, a second light source can generate a second light beam of a second wavelength, the second light beam having power sufficient to pass through at least a portion of a thickness of a wafer, an alignment module can coaxially align the second light beam with the first light beam, a coaxial module can focus the coaxially aligned first and second light beams onto a first pattern located on a front side of the wafer and a second pattern located below the first pattern, respectively, and an image capturing module can capture a first image of the first pattern and a second image of the second pattern. The second image can be captured via quantum tunneling imaging or infrared (IR) transmission imaging."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Coaxial see-through alignment imaging system","description":"Aspects of the present disclosure provide an imaging system. For example, in the imaging system a first light source can generate a first light beam of a first wavelength, a second light source can ge","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11526088","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11526088","citation_suggestion":"Patentable. \"Coaxial see-through alignment imaging system\" (US-11526088). https://patentable.app/patents/US-11526088","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11526088","json":"https://patentable.app/api/llm-context/US-11526088","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T20:33:18.879Z"}