{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11526181","patent":{"patent_number":"US-11526181","title":"Mass flow controller with absolute and differential pressure transducer","assignee":null,"inventors":[],"filing_date":"2021-06-25T00:00:00.000Z","publication_date":"2022-12-13T00:00:00.000Z","cpc_codes":["G05D"],"num_claims":9,"abstract":"Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mass flow controller with absolute and differential pressure transducer","description":"Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a secon","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11526181","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11526181","citation_suggestion":"Patentable. \"Mass flow controller with absolute and differential pressure transducer\" (US-11526181). https://patentable.app/patents/US-11526181","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11526181","json":"https://patentable.app/api/llm-context/US-11526181","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T09:22:54.044Z"}