{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11530917","patent":{"patent_number":"US-11530917","title":"Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates","assignee":null,"inventors":[],"filing_date":"2019-09-24T00:00:00.000Z","publication_date":"2022-12-20T00:00:00.000Z","cpc_codes":["G01C","G01C","G01C","G01C"],"num_claims":8,"abstract":"Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates","description":"Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insul","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11530917","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11530917","citation_suggestion":"Patentable. \"Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates\" (US-11530917). https://patentable.app/patents/US-11530917","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11530917","json":"https://patentable.app/api/llm-context/US-11530917","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T21:23:50.309Z"}