{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11532560","patent":{"patent_number":"US-11532560","title":"Method of fabricating a tungsten plug in a semiconductor device","assignee":null,"inventors":[],"filing_date":"2014-11-03T00:00:00.000Z","publication_date":"2022-12-20T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":11,"abstract":"In a semiconductor process, a seamless tungsten plug is formed in an inter-layer dielectric by forming the inter-layer dielectric from multiple oxide layers having different wet etch rates, from lowest wet-etch rate for the lowest layer to highest wet-etch rate for the highest layer, forming a hole or trench in the inter-layer dielectric using a dry etch process, reconfiguring the hole or trench to have sloped side walls by performing a wet etch step, and filling the hole or trench with tungsten and etching back the tungsten to form a seamless tungsten plug."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of fabricating a tungsten plug in a semiconductor device","description":"In a semiconductor process, a seamless tungsten plug is formed in an inter-layer dielectric by forming the inter-layer dielectric from multiple oxide layers having different wet etch rates, from lowes","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11532560","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11532560","citation_suggestion":"Patentable. \"Method of fabricating a tungsten plug in a semiconductor device\" (US-11532560). https://patentable.app/patents/US-11532560","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11532560","json":"https://patentable.app/api/llm-context/US-11532560","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:28:14.697Z"}