{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11935748","patent":{"patent_number":"US-11935748","title":"Fabricating a device using a multilayer stack","assignee":null,"inventors":[],"filing_date":"2017-12-07T00:00:00.000Z","publication_date":"2024-03-19T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":14,"abstract":"A method of fabricating a device is presented. The method includes forming a multilayer stack (101′, 102′, 103′) on a substrate (10′, 100′) which has a principal surface. The multilayer stack includes a supporting layer (102′) formed over the principal surface of the substrate and a photoresist layer (103′) formed on the supporting layer, patterning the multilayer stack to form at least one opening such that the photoresist layer is undercut by the supporting layer and anisotropically dry etching the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Fabricating a device using a multilayer stack","description":"A method of fabricating a device is presented. The method includes forming a multilayer stack (101′, 102′, 103′) on a substrate (10′, 100′) which has a principal surface. The multilayer stack includes","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11935748","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11935748","citation_suggestion":"Patentable. \"Fabricating a device using a multilayer stack\" (US-11935748). https://patentable.app/patents/US-11935748","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11935748","json":"https://patentable.app/api/llm-context/US-11935748","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:02:17.849Z"}