{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11938563","patent":{"patent_number":"US-11938563","title":"Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus","assignee":null,"inventors":[],"filing_date":"2017-10-10T00:00:00.000Z","publication_date":"2024-03-26T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":5,"abstract":"An annealed workpiece manufacturing method of irradiating a workpiece with laser light and annealing the workpiece includes a support step of supporting the workpiece, and an irradiation step of irradiating the supported workpiece with the laser light. In the support step, at least in a laser light irradiation area for the workpiece, the workpiece is supported by a cam member whose upper end height position is adjusted according to a rotation position."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus","description":"An annealed workpiece manufacturing method of irradiating a workpiece with laser light and annealing the workpiece includes a support step of supporting the workpiece, and an irradiation step of irrad","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11938563","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11938563","citation_suggestion":"Patentable. \"Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus\" (US-11938563). https://patentable.app/patents/US-11938563","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11938563","json":"https://patentable.app/api/llm-context/US-11938563","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T08:35:44.961Z"}