{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11940488","patent":{"patent_number":"US-11940488","title":"Systems and methods for high precision optical characterization of carrier transport properties in semiconductor manufacturing","assignee":null,"inventors":[],"filing_date":"2022-05-31T00:00:00.000Z","publication_date":"2024-03-26T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":14,"abstract":"A precise optical technique for measuring electronic transport properties in semiconductors is disclosed. The sensitivity of the technique to electronic transport properties follows from a simple analytic expression for the Z dependence of a photo-modulated reflectance signal in terms of the (complex) carrier diffusion length. The sensitivity of the technique to electronic transport properties also enables a trained neural network to predict electronic transport properties directly from Z-scan photo-modulated reflectance data. Synthetic data and/or physical constraints may be derived from the analytical expression and incorporated into a machine learning algorithm. Moreover, electronic transport properties as determined or predicted may be used to enable machine learning based control of semiconductor process tools and/or manufacturing processes, including via advanced reinforcement learning algorithms."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and methods for high precision optical characterization of carrier transport properties in semiconductor manufacturing","description":"A precise optical technique for measuring electronic transport properties in semiconductors is disclosed. The sensitivity of the technique to electronic transport properties follows from a simple anal","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11940488","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11940488","citation_suggestion":"Patentable. \"Systems and methods for high precision optical characterization of carrier transport properties in semiconductor manufacturing\" (US-11940488). https://patentable.app/patents/US-11940488","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11940488","json":"https://patentable.app/api/llm-context/US-11940488","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T16:50:12.802Z"}