{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11941105","patent":{"patent_number":"US-11941105","title":"Maintenance device and maintenance method for substrate processing apparatus","assignee":null,"inventors":[],"filing_date":"2019-04-26T00:00:00.000Z","publication_date":"2024-03-26T00:00:00.000Z","cpc_codes":["G06F","G06F","H01L","H01L","H01L","H01L","H04W","H04W","H01L"],"num_claims":7,"abstract":"Authentication information is acquired from a storage medium through near field communication in one authentication device. Whether the authentication information corresponds to one substrate processing apparatus at which the authentication device is provided is determined. In a case where the authentication information corresponds to the one substrate processing apparatus, access information is transmitted from the authentication device through near field communication. An instruction terminal receives the access information through near field communication. The instruction terminal accesses a maintenance instruction device based on the access information, whereby a maintenance screen is displayed on a display of the instruction terminal. The instruction terminal has an operation unit to be operated by a user in order to provide an instruction for performing a maintenance operation."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Maintenance device and maintenance method for substrate processing apparatus","description":"Authentication information is acquired from a storage medium through near field communication in one authentication device. Whether the authentication information corresponds to one substrate processi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11941105","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11941105","citation_suggestion":"Patentable. \"Maintenance device and maintenance method for substrate processing apparatus\" (US-11941105). https://patentable.app/patents/US-11941105","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11941105","json":"https://patentable.app/api/llm-context/US-11941105","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T17:42:56.050Z"}