{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11946858","patent":{"patent_number":"US-11946858","title":"Examination device","assignee":null,"inventors":[],"filing_date":"2019-10-07T00:00:00.000Z","publication_date":"2024-04-02T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":17,"abstract":"The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Examination device","description":"The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11946858","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11946858","citation_suggestion":"Patentable. \"Examination device\" (US-11946858). https://patentable.app/patents/US-11946858","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11946858","json":"https://patentable.app/api/llm-context/US-11946858","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T04:56:30.870Z"}