{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11946863","patent":{"patent_number":"US-11946863","title":"Second Harmonic Generation (SHG) optical inspection system designs","assignee":null,"inventors":[],"filing_date":"2019-05-14T00:00:00.000Z","publication_date":"2024-04-02T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G02F","G01N","G01N"],"num_claims":11,"abstract":"Second Harmonic Generation (SHG) can be used to interrogate a surface of a sample such as a layered semiconductor structure. The SHG based sample interrogation systems may simultaneously collect different polarization components of the SHG signal at a time to provide different types of information. SHG imaging systems can provide SHG images or maps of the distribution of SHG signals over a larger area of a sample. Some such SHG imaging systems employ multiple beams and multiple detectors to capture SHG signals over an area of the sample. Some SHG imaging systems employ imaging optics to image the sample onto a detector array to form SHG images."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Second Harmonic Generation (SHG) optical inspection system designs","description":"Second Harmonic Generation (SHG) can be used to interrogate a surface of a sample such as a layered semiconductor structure. The SHG based sample interrogation systems may simultaneously collect diffe","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11946863","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11946863","citation_suggestion":"Patentable. \"Second Harmonic Generation (SHG) optical inspection system designs\" (US-11946863). https://patentable.app/patents/US-11946863","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11946863","json":"https://patentable.app/api/llm-context/US-11946863","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T15:48:35.865Z"}