{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11946881","patent":{"patent_number":"US-11946881","title":"Inspection apparatus and inspection method using same","assignee":null,"inventors":[],"filing_date":"2022-04-13T00:00:00.000Z","publication_date":"2024-04-02T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","H01L"],"num_claims":20,"abstract":"An inspection apparatus includes an inspection signal source configured to irradiate a wafer with an inspection ray having a frequency in a range of 0.1 terahertz (THz) to 10 THz, a curved rail, a probe mount configured to move along the curved rail, and first and second probes coupled to the probe mount, wherein the first probe is configured to detect the inspection ray transmitted through the wafer, and the curved rail has a curved surface convex toward the first and second probes."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection apparatus and inspection method using same","description":"An inspection apparatus includes an inspection signal source configured to irradiate a wafer with an inspection ray having a frequency in a range of 0.1 terahertz (THz) to 10 THz, a curved rail, a pro","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11946881","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11946881","citation_suggestion":"Patentable. \"Inspection apparatus and inspection method using same\" (US-11946881). https://patentable.app/patents/US-11946881","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11946881","json":"https://patentable.app/api/llm-context/US-11946881","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T17:25:27.563Z"}