{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11947888","patent":{"patent_number":"US-11947888","title":"Semiconductor processing tools with improved performance by use of hybrid learning models","assignee":null,"inventors":[],"filing_date":"2023-01-19T00:00:00.000Z","publication_date":"2024-04-02T00:00:00.000Z","cpc_codes":["G06F","G06F","H01L","H01L"],"num_claims":15,"abstract":"Embodiments disclosed herein include a semiconductor manufacturing tool with a hybrid model and methods of using the hybrid model for processing wafers and/or developing process recipes. In an embodiment, a method for developing a semiconductor manufacturing process recipe comprises selecting one or more device outcomes, and querying a hybrid model to obtain a process recipe recommendation suitable for obtaining the device outcomes. In an embodiment, the hybrid process model comprises a statistical model and a physical model. In an embodiment, the method may further comprise executing a design of experiment (DoE) on a set of wafers to validate the process recipe recommended by the hybrid process model."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor processing tools with improved performance by use of hybrid learning models","description":"Embodiments disclosed herein include a semiconductor manufacturing tool with a hybrid model and methods of using the hybrid model for processing wafers and/or developing process recipes. In an embodim","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11947888","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11947888","citation_suggestion":"Patentable. \"Semiconductor processing tools with improved performance by use of hybrid learning models\" (US-11947888). https://patentable.app/patents/US-11947888","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11947888","json":"https://patentable.app/api/llm-context/US-11947888","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:40:19.381Z"}