{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11948061","patent":{"patent_number":"US-11948061","title":"Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools","assignee":null,"inventors":[],"filing_date":"2023-01-06T00:00:00.000Z","publication_date":"2024-04-02T00:00:00.000Z","cpc_codes":["G05B","G06N","G05B","G06N","G06N","G06N","G06V","G05B","G05B","G05B"],"num_claims":20,"abstract":"Implementations described herein generally relate to a method for detecting anomalies in time-series traces received from sensors of manufacturing tools. A server feeds a set of training time-series traces to a neural network configured to derive a model of the training time-series traces that minimizes reconstruction error of the training time-series traces. The server extracts a set of input time-series traces from one or more sensors associated with one or more manufacturing tools configured to produce a silicon substrate. The server feeds the set of input time-series traces to the trained neural network to produce a set of output time series traces reconstructed based on the model. The server calculates a mean square error between a first input time series trace of the set of input time series traces and a corresponding first output time series trace of the set of output time-series traces. The server declares the sensor corresponding to the first input time-series trace as having an anomaly when the mean square error exceeds a pre-determined value."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools","description":"Implementations described herein generally relate to a method for detecting anomalies in time-series traces received from sensors of manufacturing tools. A server feeds a set of training time-series t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11948061","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11948061","citation_suggestion":"Patentable. \"Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools\" (US-11948061). https://patentable.app/patents/US-11948061","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11948061","json":"https://patentable.app/api/llm-context/US-11948061","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T08:36:25.528Z"}